A series of Cr/SmCo/Cr films with high Sm concentration(37.7at%) were prepared by magnetron sputtering.Effects of SmCo thickness,annealing temperature,and annealing time on magnetic properties and crystal structure were carefully studied.Results show that crystallization degree and phase transition in the films can be controlled by the SmCo thickness and optimized by properly increasing the annealing temperature and extending the annealing time.Finally,a SmCo film with high magnetic properties and low MEI was constructed.
