We experimentally demonstrate a small-size and high-speed silicon optical switch based on the free carrier plasma dispersion in silicon.Using an embedded racetrack resonator with a quality factor of 7400,the optical switch shows an extinction ratio exceeding 13 dB with a footprint of only 2.2×10^(-3)mm^2.Moreover,a novel pre-emphasis technique is introduced to improve the optical response performance and the rise and the fall times are reduced down to 0.24 ns and 0.42 ns respectively,which are 25%and 44%lower than those without the pre-emphasis.
Silicon-based high-speed electro-optical modulator is the key component of silicon photonics for future communiction and interconnection systems. In this paper, introduced are the optical mudulation mechanisms in silicon, reviewed are some recent progresses in high-speed silicon modulators, and analyzed are advantages and shortages of the silicon modulators of different types.