In order to restrain the mid-spatial frequency error in magnetorheological finishing (MRF) process, a novel part-random path is designed based on the theory of maximum entropy method (MEM). Using KDMRF-1000F polishing machine, one flat work piece (98 mm in diameter) is polished. The mid-spatial frequency error in the region using part-random path is much lower than that by using common raster path. After one MRF iteration (7.46 min), peak-to-valley (PV) is 0.062 wave (1 wave =632.8 nm), root-mean-square (RMS) is 0.010 wave and no obvious mid-spatial frequency error is found. The result shows that the part-random path is a novel path, which results in a high form accuracy and low mid-spatial frequency error in MRF process.
