TiA1SiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nano- hardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon contents. The TiA1SiN with 9.0 at.% Silicon has a maximum hardness of 40.9 GPa, a highest adhesion force of 67 N and a lowest friction coefficient of 0.5. Microstructures show that Silicon doping increases the hardness of coating due to solid solution hardening effect and grain boundary enhancement effect. The amorphous Si3N4 matrix, which contains （Ti,Al）N nano-crystals, is formed as the Silicon content is increased. The matrix contributes to the nano-hardness and helps to resist surface oxidization. Especially, the matrix induces low surface roughness and decreases the friction coefficient.
The effects of laser wavelengths(1064,532,355 and 266 nm)on nano-processing of fabricating a groove structure on(Ti,Al,Si)N alloy film using the micro-fiber near-field enhanced irradiation are investigated.It is observed that variations of laser wavelength can effectively change the widths of the groove structures,which are featured as one-dimension bowl-like structures.The minimum of the groove width can be achieved at 293 nm with a 532 nm laser inducing.In order to fabricate the groove in nanoscale,enough energy is delivered onto(Ti,Al,Si)N surface by a single laser pulse.Simulation results are also discussed to understand the experimental results.
