Zn1-xCuxO thin films were synthesized by the radio frequency （RF） magnetron sputtering technique using a ZnO target containing different pieces of small Cu-chips. X-ray diffraction （XRD） and scanning electron microscopy （SEM） were employed to analyze the crystalline and microstructure of the film, and X-ray photoelectron spectroscopy （XPS） was used to establish the bonding characteristics and oxidation states of copper inside the ZnO host. Room temperature （RT） ferromagnetism was observed in the Znl-xCuxO films by a Quantum Design superconducting quantum interference device （SQUID） and the saturation magnetic moment of the films was found to decrease with the increase in Cu content.
